Newest Vacuum Plasma Cleaning Machine Plasma Surface Treatment Cleaning Equipment
Product Description
ModelTS-PL60MA/110MA/150MA/180MA/200MACavity material316 stainless steel/imported aluminum alloy(optional)Power frequency40KHz/13.56MHzPowerTS-PL60MA/110MA 0-500W(Adjustable)
TS-PL150MA/180MA/200MA 0-1000W(Adjustable)Treatment layers11/15/17/17/21Vacuum degree0-100pa(adjustable)Gas flow control0-500SCCM(MFC+-2%)Electrode ceramicsimported high frequency ceramicsGas channelTwo-way(addable):Ar,N,H,CF,OxygenSystem control softwareSelf-developed V2.0Control modePLC+touch screenVacuum cavity temperatureless than 30℃Vacuum pumpOil pump/dry pump(optional)+roots combinationCapacity60L/110L/150L/180L/200LCavity dimensions(LxWxH)mm400*450*400mm
500*450*500mm
500*500*600mm
500*600*600mm
600*580*700mmOverall dimensions(LxWxH)mm1000*1030*1630mm
1100*1030*1680mm
1200*1100*1730mm
1200*1200*1730mm
1250*1230*1790mmApplicationGlass,Touch green,Material science,Printing,Paper manufacturing,Ink coating,Medicine & healthcare,Thin film polymer,Electronic
circuit,Textile fibre,Chemistry and chemical industry,petrochemical industry.Featurea.highly stable and applicable to large scale continuous production.
b.special electrode structure to ensure plasma evenness.
c.applicable to the products of all shapes,high generality.
d.self-developed integrated control system software is easy to operate.
e.highly safe,multi-functional safety protection
f.the cavity dimensions and layers can be customized to satisfy customers"diversified demands
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